Machine Dimension

  1000(L)*1300(W)*1800(H)

  Scan speed

  0.55s/FOV

  Inspection accuracy

  10~20um

  Image acquisition method

  Front and back area scan

  Software operation mode

  AI+Machine Vision

  Leakage ratio

  <0.2%

  Overkill ratio

    <3%

  Data System

  Local storage + MES upload

  Application Products

  Presence, location, model, offset, etc.